China Micron etching equipment reactor has shipped over 5,000 units globally

On March 12, China Microelectronics Semiconductor Equipment Co., Ltd. announced that its total number of plasma etching equipment reactors has shipped more than 5,000 units worldwide. This includes CCP high-energy plasma etching machine and ICP low-energy plasma etching machine, single reaction stage reactor and dual reaction stage reactor, a total of four configurations of equipment.

According to China Microelectronics Corporation, plasma etching machines are the most critical and the largest micro-processing equipment in the market besides photolithography machines. Due to the smaller and smaller micro-devices and the wavelength limitations of photolithography machines, and also due to the development of micro-devices from two-dimensional to three-dimensional, etching machines have been the fastest-growing market for semiconductor equipment in the past decade.

AMEC's plasma etching equipment continues to expand its market share. Among them, the cumulative online installed capacity of CCP equipment has increased by more than 37% in the past four years, and has exceeded 4,000 reaction stations; the cumulative online installed capacity of ICP equipment has increased by more than 100% in the past four years, and has exceeded 1,000 reaction stations. As of the end of February 2025, the company has accumulated more than 5,400 reaction units in more than 130 production lines at home and abroad, fully achieving mass production and large-scale repeat sales.

According to data, China Micron mainly sells high-end semiconductor and pan-semiconductor equipment products such as plasma etching equipment, thin film equipment, and MOCVD equipment.

According to the performance report, China Micro's operating income in 2024 will be approximately 9.065 billion yuan, an increase of approximately 2.802 billion yuan compared with 2023. Among them, etching equipment revenue was approximately 7.277 billion yuan, a year-on-year increase of approximately 54.73%.